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Title: Improved physical models for advanced silicon device processing
Authors: Pelaz Montes, María Lourdes
Marqués Cuesta, Luis Alberto
Aboy Cebrián, María
López Martín, Pedro
Santos Tejido, Iván
Issue Date: 2017
Publisher: Elsevier
Description: Producción Científica
Citation: Materials Science in Semiconductor Processing Volume 62, 2017, Pages 62-79
Abstract: We review atomistic modeling approaches for issues related to ion implantation and annealing in advanced device processing. We describe how models have been upgraded to capture physical mechanisms in more detail as a response to the accuracy demanded in modern process and device modeling. Implantation and damage models based on the binary collision approximation have been improved to describe the direct formation of amorphous pockets for heavy or molecular ions. The use of amorphizing implants followed by solid phase epitaxial regrowth has motivated the development of detailed models that account for amorphization and recrystallization, considering the influence of crystal orientation and stress conditions. We apply simulations to describe the role of implant parameters to minimize residual damage, and we address doping issues that arise in non-planar structures such as FinFETs.
Classification: Silicon
Ion implantation
Implantación de iones
Peer Review: SI
Sponsor: Ministerio de Ciencia e Innovación - FEDER (Proyect TEC2014-60694-P)
Junta de Castilla y León (programa de apoyo a proyectos de investigación – Ref. VA331U14)
Publisher Version:
Language: eng
Rights: info:eu-repo/semantics/openAccess
Appears in Collections:Electrónica - Artículos de revista
DEP22 - Artículos de revista

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