TY  - JOUR 
AU  - Fisicaro, Giuseppe
AU  - Pelaz Montes, María Lourdes
AU  - Aboy Cebrián, María
AU  - López Martín, Pedro
AU  - Italia, Markus
AU  - Huet, Karim
AU  - Cristiano, Filadelfo
AU  - Essa, Zahi
AU  - Yang, Qui
AU  - Bedel Pereira, Elena
AU  - Quillec, Maurice
AU  - La Magna, Antonino
PY  - 2014
SN  - 1882-0778
UR  - http://uvadoc.uva.es/handle/10324/28622
AB  - We investigate the correlation between dopant activation and damage evolution in boron-implanted silicon under excimer laser irradiation. The dopant activation efficiency in the solid phase was measured under a wide range of irradiation conditions and...
LA  - eng
PB  - IOP Publishing
TI  - Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing
DO  - http://dx.doi.org/10.7567/APEX.7.021301
ER  -