TY  - JOUR 
AU  - Marqués Cuesta, Luis Alberto
AU  - Pelaz Montes, María Lourdes
AU  - Santos Tejido, Iván
AU  - López Martín, Pedro
AU  - Duffy, Ray
PY  - 2012
UR  - http://uvadoc.uva.es/handle/10324/28965
AB  - We use molecular dynamics (MD) simulation techniques to study the regrowth of nanometric multigate Si devices, such as fins and nanowires, surrounded by free surfaces and interfaces with amorphous material. Our results indicate that atoms in amorphous...
LA  - eng
PB  - AIP Publishing
KW  - Molecular dynamics simulation
KW  - Simulación de dinámica molecular
TI  - Molecular dynamics simulation of the regrowth of nanometric multigate Si devices
DO  - https://doi.org/10.1063/1.3679126
ER  -