TY  - THES 
A3  - Rodríguez Méndez, María Luz
A3  - López Martín, Pedro
AU  - Calvo Ruiz, Diego
PY  - 2016
UR  - http://uvadoc.uva.es/handle/10324/20512
AB  - Si is a semiconductor material whose relevance in the industry is undeniable, being
implemented in every generation of the transistor scaling over the last decades thanks
to their excellent properties and easy production. During the fabrication...
LA  - eng
KW  - Semiconductores - Propiedades
TI  - Characterization and dynamics of Si self-interstitial clusters by self-learning kinetic Monte Carlo simulations
M3  - info:eu-repo/semantics/masterThesis
ER  -