TY - GEN AU - López Martín, Pedro AU - Santos Tejido, Iván AU - Aboy Cebrián, María AU - Marqués Cuesta, Luis Alberto AU - Trochet, M. AU - Mousseau, N. AU - Pelaz Montes, María Lourdes PY - 2017 SN - 978-1-5090-5072-7 UR - http://uvadoc.uva.es/handle/10324/32297 AB - The modeling of self-interstitial defects evolution is key for process and device optimization. For a self-interstitial cluster of a given size, several configurations or topologies exist, but conventional models assume that the minimum energy one is... LA - eng PB - Institute of Electrical and Electronics Engineers (IEEE) KW - Silicio KW - Dinámica molecular KW - Silicon KW - Molecular dynamics TI - Evaluation of energy barriers for topological transitions of Si self-interstitial clusters by classical molecular dynamics and the kinetic activation-relaxation technique DO - https://doi.org/10.1109/CDE.2017.7905224 ER -