RT info:eu-repo/semantics/article
T1 On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon
A1 Marqués Cuesta, Luis Alberto
A1 Aboy Cebrián, María
A1 Santos Tejido, Iván
A1 López Martín, Pedro
A1 Cristiano, Fuccio
A1 La Magna, Antonino
A1 Huet, Karim
A1 Tabata, Toshiyuki
A1 Pelaz Montes, María Lourdes
K1 Dinámica molecular
K1 Silicio
K1 Molecular dynamics
K1 Silicon
AB We combine focused experiments with molecular dynamics simulations to investigate in detail the formation of {001} loops in nanosecond laser-annealed silicon. We demonstrate that at temperatures close to the melting point, self-interstitial rich silicon is driven into dense liquid-like droplets that are highly mobile within the solid crystalline matrix. These liquid droplets grow by a coalescence mechanism and eventually transform into {0 0 1} loops through a liquid-to-solid phase transition in the nanosecond timescale.
PB Elsevier
YR 2018
FD 2018
LK http://uvadoc.uva.es/handle/10324/32405
UL http://uvadoc.uva.es/handle/10324/32405
LA eng
NO Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,  2018, Volume 458, Pages 179-183
NO Producción Científica
DS UVaDOC
RD 29-abr-2024