TY  - JOUR 
AU  - Santos Tejido, Iván
AU  - Marqués Cuesta, Luis Alberto
AU  - Pelaz Montes, María Lourdes
AU  - López Martín, Pedro
AU  - Aboy Cebrián, María
PY  - 2012
SN  - 0094-243X
UR  - http://uvadoc.uva.es/handle/10324/31960
AB  - We have studied the temperature effect on the damage generation mechanisms in silicon, suppressing the influence of dynamic annealing. We have done dedicated classical molecular dynamics simulations to determine how the ballistic mechanism and the...
LA  - eng
PB  - AIP Publishing
KW  - Implantación de iones
KW  - Silicio
KW  - Dinámica molecular
KW  - Silicon
KW  - Ion implantation
KW  - Molecular dynamics
TI  - Temperature effect on damage generation mechanisms during ion implantation in Si. A classical molecular dynamics study
DO  - https://doi.org/10.1063/1.4766530
ER  -