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Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane

Kukli, Kaupo; Kemell, Marianna; Heikkilä, Mikko J; Castán Lanaspa, María Helena

; Dueñas Carazo, Salvador

; Mizohata, Kenichiro; Ritala, Mikko; Leskelä, Markku (2020)