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oai:uvadoc.uva.es:10324/324052025-03-26T19:10:04Zcom_10324_28025com_10324_954com_10324_894com_10324_1148com_10324_931col_10324_28026col_10324_1270

00925njm 22002777a 4500 dc Marqués Cuesta, Luis Alberto author Aboy Cebrián, María author Santos Tejido, Iván author López Martín, Pedro author Cristiano, Fuccio author La Magna, Antonino author Huet, Karim author Tabata, Toshiyuki author Pelaz Montes, María Lourdes author 2018 We combine focused experiments with molecular dynamics simulations to investigate in detail the formation of {001} loops in nanosecond laser-annealed silicon. We demonstrate that at temperatures close to the melting point, self-interstitial rich silicon is driven into dense liquid-like droplets that are highly mobile within the solid crystalline matrix. These liquid droplets grow by a coalescence mechanism and eventually transform into {0 0 1} loops through a liquid-to-solid phase transition in the nanosecond timescale. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2018, Volume 458, Pages 179-183 http://uvadoc.uva.es/handle/10324/32405 10.1016/j.nimb.2018.09.030 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon