2026-05-05T11:18:09Zhttps://uvadoc.uva.es/oai/request

oai:uvadoc.uva.es:10324/463882021-06-24T07:19:13Zcom_10324_28025com_10324_954com_10324_894com_10324_1148com_10324_931col_10324_28027col_10324_1271

Marqués Cuesta, Luis Alberto Aboy Cebrián, María López Martín, Pedro Santos Tejido, Iván Pelaz Montes, María Lourdes Fisicaro, Giuseppe 2021-04-27T12:46:35Z 2021-04-27T12:46:35Z 2021 Marqués, L. A., Aboy, M., López, P., Santos, I., Pelaz, L., Fisicaro, G. Atomistic modeling of laser-related phenomena. In: Laser Annealing Processes in Semiconductor Technology Theory, Modeling and Applications in Nanoelectronics Woodhead Publishing Series in Electronic and Optical Materials, 2021, Pages 79-136 978-0-12-820255-5 http://uvadoc.uva.es/handle/10324/46388 Producción Científica Due to the intrinsic features of laser annealing treatments in semiconductors, i.e., localized irradiation with a space- and time-dependent thermal field that leads to far-from-equilibrium conditions, experimental analysis can reveal only specimen postirradiation characteristics. In order to understand how the laser-irradiated system evolves and reaches its final state, a theoretical work based on full process simulation is required. Traditional models for laser processing simulation were based on continuum techniques. However, they prove to be insufficient at the nanoscale. Atomistic simulation techniques, in turn, are handy for studying detailed interactions, at both electronic and atomic levels, including out-of-equilibrium situations as those present in laser processing. In this chapter, we review the main techniques for atomistic simulation to be applied for laser modeling. We also present some recent results on atomistic modeling of laser-related phenomena in Si, in particular melting and regrowth processes, defect and dopant kinetics, dopant segregation, and the anomalous formation of extended defects. application/pdf eng Elsevier info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by-nc-nd/4.0/ © 2021 Elsevier Attribution-NonCommercial-NoDerivatives 4.0 Internacional Dinámica molecular Molecular dynamics Simulación atomística Atomistic simulation Atomistic modeling of laser-related phenomena info:eu-repo/semantics/bookPart info:eu-repo/semantics/acceptedVersion https://www.sciencedirect.com/science/article/pii/B9780128202555000039