2026-05-05T20:53:56Zhttps://uvadoc.uva.es/oai/request
oai:uvadoc.uva.es:10324/661612025-01-21T11:00:54Zcom_10324_43510com_10324_954com_10324_894col_10324_43513
UVaDOC author Kasikov, Aarne author Tarre, Aivar author Vinuesa Sanz, Guillermo 2024-02-12T11:13:30Z 2024-02-12T11:13:30Z 2023 Journal of Electrical Engineering VOLUME 74 (2023): ISSUE 4 (AUGUST 2023) 1335-3632 https://uvadoc.uva.es/handle/10324/66161 10.2478/jee-2023-0031 246 4 255 Journal of Electrical Engineering 74 1339-309X Thin HfO2 films atomic layer deposited from hafnium alkyl amide and oxygen plasma were analysed using spectroscopic ellipsometry and X-ray reflectivity. Low refractive index of the material for samples with less than 30 nm thickness marks the index inhomogeneity at the first stage of growth. The transition from rising density to a more stable growth takes place at about 10 to 25 nm film thickness. HfO2 films used for resistive switching experiments demonstrate either clockwise or counterclockwise behaviour depending on the film thickness. The reason for this may be the disruption of the conductive filament at different metal-insulator interfaces, which could be favoured by several mechanisms. spa Attribution-NonCommercial-NoDerivatives 4.0 Internacional Inhomogeneous HfO2 layer growth at atomic layer deposition info:eu-repo/semantics/article 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 URL https://uvadoc.uva.es/bitstream/10324/66161/1/Inhomogeneous-HfO-layer-growth-at-atomic-layer-deposition.pdf File MD5 c1a757f06efb60bd38233a8f77913973 686112 application/pdf Inhomogeneous-HfO-layer-growth-at-atomic-layer-deposition.pdf