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oai:uvadoc.uva.es:10324/665482025-02-20T07:58:09Zcom_10324_28025com_10324_954com_10324_894com_10324_1148com_10324_931col_10324_28028col_10324_1272

Santos Tejido, Iván Aboy Cebrián, María López Martín, Pedro Marqués Cuesta, Luis Alberto Martín Encinar, Luis Pelaz Montes, María Lourdes Producción Científica We used ab initio calculations to characterize PnVm(n=1−6,m=1,2) clusters in crystalline Si by calculating their formation energy, dipole moment and local vibrational modes. This information served us to discuss which PnVm complexes might be more relevant in doping during epitaxial growth or by ion implantation, and their possible behavior under microwave annealing treatments that was recently demonstrated as a promising process in technological nodes beyond 3 nm. 2024-03-07 2024-03-07 2023 9999-01-01 info:eu-repo/semantics/conferenceObject 14 Spanish Conference on Electron Devices (CDE), Valencia, Spain, 2023 979-8-3503-0240-0 https://uvadoc.uva.es/handle/10324/66548 10.1109/CDE58627.2023.10339444 eng https://ieeexplore.ieee.org/document/10339444 info:eu-repo/semantics/restrictedAccess © IEEE Institute of Electrical and Electronics Engineers (IEEE).