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oai:uvadoc.uva.es:10324/446632021-06-24T07:23:17Zcom_10324_43510com_10324_954com_10324_894col_10324_43513

Kalam, Kristjan 0341a309-5725-4c0c-8ee8-f73546de9fdd 500 Seemen, Helina af8b3c3a-1635-44f1-a7f7-e7d19040a80f 500 Mikkor, Mats a364aaa7-8d54-427e-836f-b0ac358c95d1 500 Ritslaid, Peeter 3bf0c8d9-cc7e-438a-b22d-15725ec089a9 500 Stern, Raivo 866eed9e-3f99-4e53-893d-f4355906a869 500 Dueñas Carazo, Salvador 63f5c1167ffd429a 500 0000-0002-2328-1752 Castán Lanaspa, María Helena 4cef05d647825969 500 0000-0002-3874-721X Tamm, Aile ceb5411e-0560-470d-b050-bcb4802dbd98 500 Kukli, Kaupo 7f6f09a5-e25b-469a-a58a-fef848c703d2 500 2021-01-08T11:59:55Z 2021-01-08T11:59:55Z 2018 ECS Journal of Solid State Science and Technology, 2018, vol. 7, n. 9. p. 117-122 2162-8777 http://uvadoc.uva.es/handle/10324/44663 10.1149/2.0041809jss Producción Científica Atomic layer deposition method was employed to deposit thin films consisting of ZrO2 and HfO2. Zirconia films were doped with hafnia and vice versa, and also nanolaminates were formed. All depositions were carried out at 300°C. Most films were crystalline in their as-deposited state. Zirconia exhibited the metastable cubic and tetragonal phases by a large majority, whereas hafnia was mostly in its stable monoclinic phase. Magnetic and electrical properties of the films were assessed. Un-doped zirconia was ferromagnetic and this property diminished with increasing the amount of hafnia in a film. All films exhibited ferroelectric-like behavior and the polarization curves also changed with respect to the film composition. Fondo Europeo de Desarrollo Regional (project TK134) Ministerio de Economía, Industria y Competitividad (grant TEC2017-84321-C4-2-R) Estonian Research Agency (grants IUT2-24 and PRG4) application/pdf eng IOP Publishing info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by-nc-nd/4.0/ © 2018 IOP Publishing Attribution-NonCommercial-NoDerivatives 4.0 Internacional Thin films Láminas delgadas Atomic layer deposition Deposición atómica de capas Electric and magnetic properties of atomic layer deposited ZrO2-HfO2 thin films info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion https://iopscience.iop.org/article/10.1149/2.0041809jss SI THUMBNAIL Electric-and-magnetic-properties.pdf.jpg Electric-and-magnetic-properties.pdf.jpg IM Thumbnail image/jpeg 1504 https://uvadoc.uva.es/bitstream/10324/44663/4/Electric-and-magnetic-properties.pdf.jpg d7bb7b2fca9bc579fa459818c97ac0a6 MD5 4 LICENSE license.txt license.txt text/plain 3926 https://uvadoc.uva.es/bitstream/10324/44663/3/license.txt 017313583e37a1e4d1253e1ef6c66c6c MD5 3 CC-LICENSE license_rdf license_rdf application/rdf+xml; charset=utf-8 817 https://uvadoc.uva.es/bitstream/10324/44663/2/license_rdf 975848b171c53b753f7e445c8b5bc0e1 MD5 2 ORIGINAL Electric-and-magnetic-properties.pdf Electric-and-magnetic-properties.pdf application/pdf 1203446 https://uvadoc.uva.es/bitstream/10324/44663/1/Electric-and-magnetic-properties.pdf a31f4f7f38ec7d16f704472cf9c54b5f MD5 1 10324/44663 oai:uvadoc.uva.es:10324/44663 2021-06-24 09:23:17.382 UVaDOC repositorio@uva.es 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