RT info:eu-repo/semantics/conferenceObject T1 Modeling SiGe through classical molecular dynamics simulations: chasing an appropriate empirical potential T2 Spanish Conference on Electron Devices (CDE 2018) A1 Martín Encinar, Luis A1 Santos Tejido, Iván A1 López Martín, Pedro A1 Marqués Cuesta, Luis Alberto A1 Aboy Cebrián, María A1 Pelaz Montes, María Lourdes K1 Simulaciones de dinámica molecular K1 Molecular dynamics simulations AB We used classical molecular dynamics simulations to reproduce basic properties of Si, Ge and SiGe using different empirical potentials available in the literature. The empirical potential that offered the better compromise with experimental data was used to study the surface stability of these materials. We considered the (100), (100)2×1 and (111) surfaces, and we found the processing temperature range to avoid the structural degradation of studied surfaces. PB Institute of Electrical and Electronics Engineers (IEEE). SN 978-1-5386-5779-9 YR 2019 FD 2019 LK http://uvadoc.uva.es/handle/10324/33903 UL http://uvadoc.uva.es/handle/10324/33903 LA eng NO 2018 Spanish Conference on Electron Devices (CDE). Proceedings, 14-16 Nov. 2018, Salamanca. NO Producción Científica DS UVaDOC RD 27-abr-2024