RT info:eu-repo/semantics/article T1 Properties of atomic layer deposited nanolaminates of zirconium and cobalt oxides A1 Seemen, Helina A1 Rähn, Mihkel A1 Kalam, Kristjan A1 Sajavaara, Timo A1 Dueñas Carazo, Salvador A1 Castán Lanaspa, María Helena A1 Link, Joosep A1 Stern, Raivo A1 Kukli, Kaupo A1 Tamm, Aile K1 Metal oxides K1 Óxidos metálicos K1 Nanolaminates K1 Nanoláminas AB Five-layer crystalline thin film structures were formed, consisting of ZrO2 and Co3O4 alternately grown on Si(100) substrates by atomic layer deposition at 300°C using ZrCl4 and Co(acac)3 as the metal precursors and ozone as the oxygen precursor. The performance of the laminate films was dependent on the relative content of constituent oxide layers. The magnetization in these films was nonlinear, saturative, and with very weak coercive fields. Electrical measurements revealed the formation of significant polarization versus external field loops and implied some tendency toward memristive behavior. PB IOP Publishing SN 2162-8777 YR 2018 FD 2018 LK http://uvadoc.uva.es/handle/10324/44656 UL http://uvadoc.uva.es/handle/10324/44656 LA eng NO ECS Journal of Solid State Science and Technology, 2018, vol. 7, n. 8. p. 402-409 NO Producción Científica DS UVaDOC RD 22-nov-2024