RT info:eu-repo/semantics/article T1 Cathodoluminescence of undoped and Si-doped ɛ-Ga2O3 films A1 Montedoro, Vincenzo A1 Torres Pérez, Alfredo A1 Dadgostar, Shabnam A1 Jiménez López, Juan Ignacio A1 Bosi, Matteo A1 Parisini, Antonella A1 Fornari, Roberto K1 Gallium oxide K1 Óxido de galio K1 Cathodoluminescence K1 Catodoluminiscencia AB Cathodoluminescence (CL) investigations are performed on nominally undoped and Si-doped ε-Ga2O3 samples grown by metal-organic vapor phase epitaxy on (0001)-Al2O3 substrates, using different carrier gases. All films exhibit a broad low-temperature CL emission extending over the photon energy range 2–3.4 eV. Emission deconvolution suggests that four narrower bands centered at about 2.4, 2.75, 3.0 and 3.15 eV may well account for the broad band. While the position of these peaks results independent of the growth conditions, significant intensity differences are observed. A general reduction of the broad emission is evidenced as the Si concentration increases. No band-to-band recombination is observed. Temperature dependence of the CL signal shows a trend consistent with radiative transitions from the CB to deep acceptor states, probably of intrinsic nature. PB Elsevier SN 0921-5107 YR 2021 FD 2021 LK https://uvadoc.uva.es/handle/10324/49454 UL https://uvadoc.uva.es/handle/10324/49454 LA eng NO Materials Science and Engineering: B, 2021, vol. 264. 114918 NO Producción Científica DS UVaDOC RD 25-abr-2024