RT info:eu-repo/semantics/article T1 Effect of the incorporation of titanium on the optical properties of ZnO thin films: from doping to mixed oxide formation A1 Yuste, Miriam A1 Escobar Galindo, Ramón A1 Benito, Noelia A1 Palacio, Carlos A1 Martínez Sacristán, Óscar A1 Albella, José A1 Sánchez, Olga K1 Ti doped ZnO K1 Thin film K1 UV-visible K1 Mixed oxide formation K1 22 Física K1 33 Ciencias Tecnológicas AB ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grownby reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporationin the ZnO matrix on the structural and optical characteristics of the samples has been determined byRutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-raydiffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit awurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure,forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads toa significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to aprogressive amorphization of the wurtzite-like structure, so samples with high Ti content ( 18 at.%)display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixedoxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pureZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples<0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence(PL) emission, thereby indicating a significant improvement of the PL efficiency of the samples. PB MDPI SN 2079-6412 YR 2019 FD 2019 LK https://uvadoc.uva.es/handle/10324/50644 UL https://uvadoc.uva.es/handle/10324/50644 LA eng NO Coatings, 2019, vol. 9, n. 3, p. 180 NO Producción Científica DS UVaDOC RD 25-nov-2024