RT info:eu-repo/semantics/article T1 Electrical and magnetic properties of atomic layer deposited cobalt oxide and iron oxide stacks A1 Kalam, Kristjan A1 Rammula, Raul A1 Kozlova, Jekaterina A1 Käämbre, Tanel A1 Ritslaid, Peeter A1 Kasikov, Aarne A1 Tamm, Aile A1 Link, Joosep A1 Stern, Raivo A1 Vinuesa, Guillermo A1 Dueñas, Salvador A1 Castán, Helena A1 Kukli, Kaupo AB Cobalt and iron oxides, due to their tunable structural and magnetic properties, are widely studied for electronic and spintronic applications. However, achieving high coercivity and saturation magnetization in ultrathin films remains a challenge. In this work, we report on the atomic layer deposition (ALD) of nanolaminates and mixed cobalt–iron oxide films on silicon and TiN substrates at 300–450 °C. Using supercycle and multistep ALD methods with ferrocene and cobalt acetylacetonate precursors, we synthesized Co3O4–Fe2O3 bilayers and ternary ferrites (Co2FeO4 and CoFe2O4). The structural, morphological, electrical, and magnetic properties were characterized. We observed that thin films (∼7–12 nm) exhibit markedly enhanced breakdown fields and exceptional magnetic coercivity (up to 25 kOe) and saturation magnetization (up to 1000 emu cm−3), especially after annealing. These results demonstrate a viable route to engineer ferrite-based thin films with superior magnetic and dielectric performance at nanoscale thicknesses. PB Royal Society of Chemistry SN 2050-7526 YR 2025 FD 2025 LK https://uvadoc.uva.es/handle/10324/82525 UL https://uvadoc.uva.es/handle/10324/82525 LA spa NO Journal of Materials Chemistry C, 2025, 13, 17551-17565 NO Producción Científica DS UVaDOC RD 06-feb-2026