RT dataset
T1 Experimental data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication
A1 González Guirado, Ginés
A1 Pura Ruiz, Jose Luis
A2 Universidad de ValladolidGdS-Optronlab
K1 Silicon Nanowires
K1 Semiconductor Qubits
K1 Micro-Raman Spectroscopy
K1 Stress Engineering
K1 Dry Etching
K1 Spin-Based qubits
AB Raw data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication.Subfolder Free-standing_SiNWs: contains the raw data of the measurements taken along the free-standing Si nanowires and the temperature calibration.Subfolder SiNWs_with_substrate: contains the raw data of the measurements taken along the Si nanowires with the substrate in the samples C4F2 and C4F10.
YR 2026
FD 2026-02-24
LK https://uvadoc.uva.es/handle/10324/83047
UL https://uvadoc.uva.es/handle/10324/83047
LA eng
NO GdS-Optronlab
DS UVaDOC
RD 24-feb-2026