RT dataset
T1 Experimental data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication
A1 González Guirado, Ginés
A1 Pura Ruiz, Jose Luis
A2 Universidad de Valladolid. Grupo de Semiconductores Optronlab
K1 Silicon Nanowires
K1 Semiconductor Qubits
K1 Micro-Raman Spectroscopy
K1 Stress Engineering
K1 Dry Etching
K1 Spin-Based qubits
AB Raw data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication.Subfolder Free-standing_SiNWs: contains the raw data of the measurements taken along the free-standing Si nanowires and the temperature calibration.Subfolder SiNWs_with_substrate: contains the raw data of the measurements taken along the Si nanowires with the substrate in the samples C4F2 and C4F10.
YR 2026
FD 2026
LK https://uvadoc.uva.es/handle/10324/83047
UL https://uvadoc.uva.es/handle/10324/83047
LA eng
NO Grupo de Semiconductores Optronlab
DS UVaDOC
RD 03-abr-2026