RT dataset T1 Q-TECH A1 González Guirado, Ginés A1 Pura Ruiz, Jose Luis A2 Universidad de Valladolid. Grupo de Semiconductores Optronlab K1 Silicon Nanowires K1 Semiconductor Qubits K1 Micro-Raman Spectroscopy K1 Stress Engineering K1 Dry Etching K1 Spin-Based qubits AB Experimental data of the project: Experimental data of the project: Technology platform for exploring novel concepts in semiconductor devices for quantum computing (Q-TECH). Subfolder Free-standing_SiNWs: contains the raw data of the measurements taken along the free-standing Si nanowires and the temperature calibration. Subfolder SiNWs_with_substrate: contains the raw data of the measurements taken along the Si nanowires with the substrate. Subfolder SiNWs_SiO2membranes: contains the raw data of the measurements taken along the Si nanowires with the silicon oxide membrane. Subfolder AFM: contains the raw data of the AFM measurements taken along the Si nanowires. YR 2026 FD 2026 LK https://uvadoc.uva.es/handle/10324/83325 UL https://uvadoc.uva.es/handle/10324/83325 LA eng NO Departemento de Física de la Materia Condensada, Cristalografía y Mineralogía DS UVaDOC RD 29-mar-2026