RT dataset T1 Experimental Data Silicon nanowires (QTECH project) A1 González Guirado, Ginés A1 Pura Ruiz, Jose Luis A1 Hinojosa Chasiquiza, Vanessa Giselle A2 Universidad de Valladolid. Grupo de Semiconductores Optronlab K1 Silicon Nanowires K1 Semiconductor Qubits K1 Micro-Raman Spectroscopy K1 Stress Engineering K1 Dry Etching K1 Spin-Based qubits AB Experimental data of Si nanowires within the project Q-TECH. Subfolder "AFM" contains the Atomic Force microscopy measurements of the Si nanowires. Subfolder "Free-standing_SiNWs": contains the raw data of the measurements taken along the free-standing Si nanowires and the temperature calibration. Subfolder "SiNWs_with_substrate": contains the raw data of the measurements taken along the Si nanowires with the substrate. Subfolder "SiNWs_SiO2membranes": contains the raw data of the measurements taken along the Si nanowires with the silicon oxide membrane. YR 2026 FD 2026 LK https://uvadoc.uva.es/handle/10324/83398 UL https://uvadoc.uva.es/handle/10324/83398 LA eng NO Departemento de Física de la Materia Condensada, Cristalografía y Mineralogía DS UVaDOC RD 11-mar-2026