TY  - JOUR 
AU  - Seemen, Helina
AU  - Rähn, Mihkel
AU  - Kalam, Kristjan
AU  - Sajavaara, Timo
AU  - Dueñas Carazo, Salvador
AU  - Castán Lanaspa, María Helena
AU  - Link, Joosep
AU  - Stern, Raivo
AU  - Kukli, Kaupo
AU  - Tamm, Aile
PY  - 2018
SN  - 2162-8777
UR  - http://uvadoc.uva.es/handle/10324/44656
AB  - Five-layer crystalline thin film structures were formed, consisting of ZrO2 and Co3O4 alternately grown on Si(100) substrates by atomic layer deposition at 300°C using ZrCl4 and Co(acac)3 as the metal precursors and ozone as the oxygen precursor. The...
LA  - eng
PB  - IOP Publishing
KW  - Metal oxides
KW  - Óxidos metálicos
KW  - Nanolaminates
KW  - Nanoláminas
TI  - Properties of atomic layer deposited nanolaminates of zirconium and cobalt oxides
DO  - 10.1149/2.0191808jss
ER  -