TY  - JOUR 
AU  - Kalam, Kristjan
AU  - Seemen, Helina
AU  - Mikkor, Mats
AU  - Jõgiaas, Taivo
AU  - Ritslaid, Peeter
AU  - Tamm, Aile
AU  - Kukli, Kaupo
AU  - Kasikov, Aarne
AU  - Link, Joosep
AU  - Stern, Raivo
AU  - Dueñas Carazo, Salvador
AU  - Castán Lanaspa, María Helena
PY  - 2019
SN  - 0040-6090
UR  - http://uvadoc.uva.es/handle/10324/45168
AB  - Nanolaminates of ZrO2 and Co3O4 were atomic layer deposited on silicon and titanium nitride at 300 °C. Films were confirmed to be polycrystalline in the as-deposited state, with the cubic phase dominating in both oxides. All films exhibited resistive...
LA  - eng
PB  - Elvier
KW  - Óxido de cobalto
KW  - Cobalt oxide
TI  - Electrical and magnetic properties of atomic layer deposited cobalt oxide and zirconium oxide nanolaminates
DO  - 10.1016/j.tsf.2018.11.008
ER  -