TY  - JOUR 
AU  - Tamm, Aile
AU  - Kalam, Kristjan
AU  - Seemen, Helina
AU  - Kozlova, Jekaterina
AU  - Kukli, Kaupo
AU  - Aarik, Jaan
AU  - Link, Joosep
AU  - Stern, Raivo
AU  - Dueñas Carazo, Salvador
AU  - Castán Lanaspa, María Helena
PY  - 2017
SN  - 2470-1343
UR  - https://uvadoc.uva.es/handle/10324/65970
AB  - Mixed films of a high-permittivity oxide, Er2O3, and a magnetic material, Fe2O3, were grown by atomic layer deposition on silicon and titanium nitride at 375 °C using erbium diketonate, ferrocene, and ozone as precursors. Crystalline phases of erbium...
LA  - spa
PB  - ACS Omega
KW  - Deposition
KW  - Layers
KW  - Magnetic properties
KW  - Oxides
KW  - Thin films
TI  - Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films
DO  - 10.1021/acsomega.7b01394
ER  -