TY  - JOUR 
AU  - Santos Tejido, Iván
AU  - Caballo Zulueta, Ana
AU  - Aboy Cebrián, María
AU  - Marqués Cuesta, Luis Alberto
AU  - López Martín, Pedro
AU  - Pelaz Montes, María Lourdes
PY  - 2022
SN  - 0168-583X
UR  - https://uvadoc.uva.es/handle/10324/51137
AB  - Emergent alternative Si processes and devices have promoted applications outside the usual processing temperature window and the failure of traditional defect kinetics models. These models are based on Ostwald ripening mechanisms, assume...
LA  - eng
PB  - Elsevier
KW  - Silicon processing
KW  - Si self-interstitial clusters
KW  - Atomistic simulations
KW  - Ostwald ripening
TI  - Extending defect models for Si processing: The role of energy barriers for defect transformation, entropy and coalescence mechanism
DO  - 10.1016/j.nimb.2021.12.002
ER  -