TY  - RPRT 
AU  - González Guirado, Ginés
AU  - Pura Ruiz, Jose Luis
A2  - Universidad de Valladolid, GdS-Optronlab
PY  - 2026
UR  - https://uvadoc.uva.es/handle/10324/83047
AB  - Raw data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication.
Subfolder Free-standing_SiNWs: contains the raw data of the measurements taken along the free-standing Si nanowires and the temperature...
LA  - eng
KW  - Silicon Nanowires
KW  - Semiconductor Qubits
KW  - Micro-Raman Spectroscopy
KW  - Stress Engineering
KW  - Dry Etching
KW  - Spin-Based qubits
TI  - Experimental data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication
ER  -