Design and Characterization of a 2D Array of MEMS Microphones for Acoustical Imaging

Abstract

This paper presents the characterization of each of the MEMS microphones which form a uniform planar array used for acoustical imaging. These microphones show an esentialy flat frequency response, with a ±2dB variation between all sensors. This paper also shows the design and the acoustic characterization of the planar array of MEMS microphones. Analyzing the acoustic array characterization it was observed that as the variations of the measured beampattern, with respect to the theoretical one, are limited, it is not necessary to apply calibration techniques to the array.