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Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane	318

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Nb2O5-SiO2-accepted-manuscript.pdf	212

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Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane	67

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Nb2O5-SiO2-accepted-manuscript.pdf	51

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