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Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit	510

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Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit	245

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Efficient-stable-activation.pdf	40
Supplementary-material-Efficient-stable-activation.pdf	4

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March 2025	12
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