Mostrar el registro sencillo del ítem
dc.contributor.author | López Martín, Pedro | |
dc.contributor.author | Santos Tejido, Iván | |
dc.contributor.author | Aboy Cebrián, María | |
dc.contributor.author | Marqués Cuesta, Luis Alberto | |
dc.contributor.author | Trochet, M. | |
dc.contributor.author | Mousseau, N. | |
dc.contributor.author | Pelaz Montes, María Lourdes | |
dc.date.accessioned | 2018-10-24T11:51:00Z | |
dc.date.available | 2018-10-24T11:51:00Z | |
dc.date.issued | 2017 | |
dc.identifier.citation | 2017 Spanish Conference on Electron Devices (CDE). Proceedings, 8-10 February 2017, Barcelona | es |
dc.identifier.isbn | 978-1-5090-5072-7 | es |
dc.identifier.uri | http://uvadoc.uva.es/handle/10324/32297 | |
dc.description | Producción Científica | es |
dc.description.abstract | The modeling of self-interstitial defects evolution is key for process and device optimization. For a self-interstitial cluster of a given size, several configurations or topologies exist, but conventional models assume that the minimum energy one is instantaneously reached. The existence of significant energy barriers for configurational transitions may change the picture of defect evolution in non-equilibrium processes (such as ion implantation), and contribute to explain anomalous defect observations. In this work, we present a method to determine the energy barriers for topological transitions among small self-interstitial defects, which is applied to characterize the Si self-interstitial and the di-interstitial cluster. | es |
dc.format.mimetype | application/pdf | es |
dc.language.iso | eng | es |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | es |
dc.rights.accessRights | info:eu-repo/semantics/openAccess | es |
dc.subject.classification | Silicio | es |
dc.subject.classification | Dinámica molecular | es |
dc.subject.classification | Silicon | es |
dc.subject.classification | Molecular dynamics | es |
dc.title | Evaluation of energy barriers for topological transitions of Si self-interstitial clusters by classical molecular dynamics and the kinetic activation-relaxation technique | es |
dc.type | info:eu-repo/semantics/conferenceObject | es |
dc.rights.holder | © 2017 IEEE | |
dc.identifier.doi | https://doi.org/10.1109/CDE.2017.7905224 | es |
dc.relation.publisherversion | https://ieeexplore.ieee.org/document/7905224 | es |
dc.title.event | 2017 Spanish Conference on Electron Devices (CDE) | es |
dc.title.event | Spanish Conference on Electron Devices (CDE 2017) | |
dc.description.project | Ministerio de Ciencia e Innovación (Proyect TEC2014-60694-P) | es |
dc.description.project | Junta de Castilla y León (programa de apoyo a proyectos de investigación - Ref. VA331U14) | es |