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dc.contributor.authorTsai, C.H.
dc.contributor.authorHsu, Y.H.
dc.contributor.authorSantos Tejido, Iván 
dc.contributor.authorPelaz Montes, María Lourdes 
dc.contributor.authorKowalski, J.E.
dc.contributor.authorLiou, J.W.
dc.contributor.authorWoon, W.Y.
dc.contributor.authorLee, C.K.
dc.date.accessioned2021-01-25T08:34:21Z
dc.date.available2021-01-25T08:34:21Z
dc.date.issued2021
dc.identifier.citationMaterials Science in Semiconductor Processing Volume 127, 2021, 105672es
dc.identifier.issn1369-8001es
dc.identifier.urihttp://uvadoc.uva.es/handle/10324/45124
dc.descriptionProducción Científicaes
dc.description.abstractJunction stability and donor deactivation in silicon at high doping limit has been a long-standing issue in advanced semiconductor devices. Recently, heavily doped epitaxial Si:P layer with phosphorus concentrations as high as 3 × 1021 at./cm3 has been employed in nanowire field-effect transistor (FET) devices for sub-3 nm technology node as low resistance source-drain and channel stressor. In such highly doped Si:P, the actual dopant activation is much less than nominal phosphorus concentration due to inactive phosphorus atoms arising from dopant-vacancy defects (PnV) clustering phenomenon. Even with state-of-the-art high temperature millisecond annealing, this epitaxial film is thermally unstable upon subsequent thermal treatments. To overcome this limitation, we demonstrate a selective dopant activation scheme which results from the dipole moments of inactive PnV structures within the crystal lattice and their direct energy coupling with the external electric field. It's found that superior stability in dopant activation can be achieved through microwave annealing when a specific temperature and field conditions are met using a triple-parallel-susceptor setup in the microwave cavity. Based on experimental results and ab-initio calculation, we proposed a model, whereas the microwave-PnV interactions result in a specific distribution of dopant defect dominated by thermally stable P4V clusters through elimination of unstable low order PnV, leading to the suppression of donor deactivation and achieving thermally stable junction.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherElsevieres
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subject.classificationMicroondases
dc.subject.classificationMicroondases
dc.subject.classificationDopinges
dc.subject.classificationDopajees
dc.titleAchieving junction stability in heavily doped epitaxial Si:Pes
dc.typeinfo:eu-repo/semantics/articlees
dc.identifier.doi10.1016/j.mssp.2021.105672es
dc.relation.publisherversionhttps://www.sciencedirect.com/science/article/pii/S1369800121000159?via%3Dihubes
dc.identifier.publicationfirstpage105672es
dc.identifier.publicationtitleMaterials Science in Semiconductor Processinges
dc.identifier.publicationvolume127es
dc.peerreviewedSIes
dc.description.projectMinisterio de Ciencia, Innovación y Universidades (Project MOST-109-2628-M-008-004-MY3)es
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.type.hasVersioninfo:eu-repo/semantics/acceptedVersiones


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