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dc.contributor.authorSantos Tejido, Iván 
dc.contributor.authorAboy Cebrián, María 
dc.contributor.authorLópez Martín, Pedro 
dc.contributor.authorMarqués Cuesta, Luis Alberto 
dc.contributor.authorMartín Encinar, Luis
dc.contributor.authorPelaz Montes, María Lourdes 
dc.date.accessioned2024-03-07T09:03:10Z
dc.date.available2024-03-07T09:03:10Z
dc.date.issued2023
dc.identifier.citation14 Spanish Conference on Electron Devices (CDE), Valencia, Spain, 2023es
dc.identifier.isbn979-8-3503-0240-0es
dc.identifier.urihttps://uvadoc.uva.es/handle/10324/66548
dc.descriptionProducción Científicaes
dc.description.abstractWe used ab initio calculations to characterize PnVm(n=1−6,m=1,2) clusters in crystalline Si by calculating their formation energy, dipole moment and local vibrational modes. This information served us to discuss which PnVm complexes might be more relevant in doping during epitaxial growth or by ion implantation, and their possible behavior under microwave annealing treatments that was recently demonstrated as a promising process in technological nodes beyond 3 nm.es
dc.format.extent4 p.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE).es
dc.rights.accessRightsinfo:eu-repo/semantics/restrictedAccesses
dc.subject.classificationPhosphorous-vacancy clusterses
dc.subject.classificationAb initio calculationses
dc.subject.classificationDipole momentses
dc.subject.classificationMicrowave annealinges
dc.subject.classificationCrystalline Sies
dc.titleFirst Principles Characterization of PnVm Clusters in Crystalline Silicones
dc.typeinfo:eu-repo/semantics/conferenceObjectes
dc.rights.holder© IEEEes
dc.identifier.doi10.1109/CDE58627.2023.10339444es
dc.relation.publisherversionhttps://ieeexplore.ieee.org/document/10339444es
dc.title.event14 Spanish Conference on Electron Devices (CDE)es
dc.description.projectPID2020-115118GB-I00: Atomistic modeling of high energy irradiation in semiconductors,es
dc.type.hasVersioninfo:eu-repo/semantics/publishedVersiones
dc.subject.unesco2202.03 Electricidades


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