Browsing Grupos de Investigación by Subject "Deposición de capa atómica"

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Browsing Grupos de Investigación by Subject

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Browsing Grupos de Investigación by Subject

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Browsing Grupos de Investigación by Subject "Deposición de capa atómica"

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Atomic layer deposition and properties of ZrO2/Fe2O3 thin films

Kalam, Kristjan; Seemen, Helina; Ritslaid, Peeter; Rähn, Mihkel; Tamm, Aile; Kukli, Kaupo; Kasikov, Aarne; Link, Joosep; Stern, Raivo; Dueñas Carazo, Salvador ; Castán Lanaspa, María Helena ; García García, Héctor (2018)
Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane

Kukli, Kaupo; Kemell, Marianna; Heikkilä, Mikko J; Castán Lanaspa, María Helena ; Dueñas Carazo, Salvador ; Mizohata, Kenichiro; Ritala, Mikko; Leskelä, Markku (2020)

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