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dc.contributor.authorFisicaro, Giuseppe
dc.contributor.authorPelaz Montes, María Lourdes 
dc.contributor.authorAboy Cebrián, María 
dc.contributor.authorLópez Martín, Pedro 
dc.contributor.authorItalia, Markus
dc.contributor.authorHuet, Karim
dc.contributor.authorCristiano, Filadelfo
dc.contributor.authorEssa, Zahi
dc.contributor.authorYang, Qui
dc.contributor.authorBedel Pereira, Elena
dc.contributor.authorQuillec, Maurice
dc.contributor.authorLa Magna, Antonino
dc.date.accessioned2018-02-20T12:34:57Z
dc.date.available2018-02-20T12:34:57Z
dc.date.issued2014
dc.identifier.citationApplied Physics Express, 2014, Volume 7, Number 2es
dc.identifier.issn1882-0778es
dc.identifier.urihttp://uvadoc.uva.es/handle/10324/28622
dc.descriptionProducción Científicaes
dc.description.abstractWe investigate the correlation between dopant activation and damage evolution in boron-implanted silicon under excimer laser irradiation. The dopant activation efficiency in the solid phase was measured under a wide range of irradiation conditions and simulated using coupled phase-field and kinetic Monte Carlo models. With the inclusion of dopant atoms, the presented code extends the capabilities of a previous version, allowing its definitive validation by means of detailed comparisons with experimental data. The stochastic method predicts the post-implant kinetics of the defect-dopant system in the far-from-equilibrium conditions caused by laser irradiation. The simulations explain the dopant activation dynamics and demonstrate that the competitive dopant-defect kinetics during the first laser annealing treatment dominates the activation phenomenon, stabilizing the system against additional laser irradiation steps.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherIOP Publishinges
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.titleKinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealinges
dc.typeinfo:eu-repo/semantics/articlees
dc.identifier.doihttp://dx.doi.org/10.7567/APEX.7.021301es
dc.relation.publisherversionhttp://iopscience.iop.org/article/10.7567/APEX.7.021301es
dc.peerreviewedSIes
dc.description.projectMinisterio de Ciencia e Innovación (Proyect TEC2011-27701)es
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/FP7/258547
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International


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