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dc.contributor.authorSantos Tejido, Iván 
dc.contributor.authorAboy Cebrián, María 
dc.contributor.authorMarqués Cuesta, Luis Alberto 
dc.contributor.authorLópez Martín, Pedro 
dc.contributor.authorRuiz Prieto, Manuel
dc.contributor.authorPelaz Montes, María Lourdes 
dc.contributor.authorHernández Díaz, A.M.
dc.contributor.authorCastrillo, P.
dc.date.accessioned2018-10-24T12:11:13Z
dc.date.available2018-10-24T12:11:13Z
dc.date.issued2016
dc.identifier.citation2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Nuremberg, 2016, p. 35-37es
dc.identifier.isbn978-1-5090-0818-6es
dc.identifier.urihttp://uvadoc.uva.es/handle/10324/32298
dc.descriptionProducción Científicaes
dc.description.abstractIn this work we propose a methodology to analyze the elastic energy interaction at the atomic level between Si self-interstitials and extended defects in crystalline Si. The representation of this energy in maps in 2D planes shows the anisotropic nature of the elastic interaction. This elastic energy maps can be used to understand diffusion trajectories of Si self-interstitials around extended defects obtained from classical molecular dynamics simulations. The combined analysis of these trajectories and the elastic energy maps shows preferential capture directions around extended defects.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)es
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subject.classificationSimulaciones atomísticases
dc.subject.classificationSilicio cristalinoes
dc.subject.classificationAtomistic simulationes
dc.subject.classificationCrystalline silicones
dc.titleAtomistic study of the anisotropic interaction between extended and point defects in crystalline silicon and its influence on Si self-interstitial diffusiones
dc.typeinfo:eu-repo/semantics/conferenceObjectes
dc.identifier.doihttps://doi.org/10.1109/SISPAD.2016.7605142es
dc.relation.publisherversionhttps://ieeexplore.ieee.org/document/7605142es
dc.title.event2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)es
dc.title.eventInternational Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2016)
dc.description.projectMinisterio de Ciencia e Innovación (Proyect TEC2014-60694-P)es
dc.description.projectJunta de Castilla y León (programa de apoyo a proyectos de investigación - Ref. VA331U14)es
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International


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