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dc.contributor.authorKahro, Tauno
dc.contributor.authorCastán Lanaspa, María Helena 
dc.contributor.authorDueñas Carazo, Salvador 
dc.contributor.authorMerisalu, Joonas
dc.contributor.authorKozlova, Jekaterina
dc.contributor.authorJõgiaas, Taivo
dc.contributor.authorPiirsoo, Helle-Mai
dc.contributor.authorKasikov, Aarne
dc.contributor.authorRitslaid, Peeter
dc.contributor.authorMändar, Hugo
dc.contributor.authorTarre, Aivar
dc.contributor.authorTamm, Aile
dc.contributor.authorKukli, Kaupo
dc.date.accessioned2021-01-11T13:13:29Z
dc.date.available2021-01-11T13:13:29Z
dc.date.issued2020
dc.identifier.citationJournal of Vacuum Science & Technology A, 2020, vol. 38, n. 6. 10 p.es
dc.identifier.issn1520-8559es
dc.identifier.urihttp://uvadoc.uva.es/handle/10324/44705
dc.descriptionProducción Científicaes
dc.description.abstractZrO2-graphene-ZrO2 layered structures were built and their crystallinity was characterized before resistive switching measurements. Thin nanocrystalline ZrO2 dielectric films were grown by atomic layer deposition on chemical vapor deposited graphene. Graphene was transferred, prior to the growth of the ZrO2 overlayer, to the ZrO2 film pre-grown on titanium nitride. Nucleation and growth of the top ZrO2 layer was improved after growing an amorphous Al2O3 interface layer on graphene at lowered temperatures. Studies on resistive switching in such structures revealed that the exploitation of graphene interlayers could modify the operational voltage ranges and somewhat increase the ratio between high and low resistance states.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherAIP Publishinges
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subject.classificationAtomic layer depositiones
dc.subject.classificationDeposición atómica de capases
dc.subject.classificationNanomaterialses
dc.subject.classificationNanomaterialses
dc.subject.classificationThin filmses
dc.subject.classificationLáminas delgadases
dc.subject.classificationGraphenees
dc.subject.classificationGrafenoes
dc.titleStructure and behavior of ZrO2-graphene-ZrO2 stackses
dc.typeinfo:eu-repo/semantics/articlees
dc.rights.holder© 2020 AIP Publishinges
dc.identifier.doi10.1116/6.0000390es
dc.relation.publisherversionhttps://avs.scitation.org/doi/10.1116/6.0000390es
dc.peerreviewedSIes
dc.description.projectFondo Europeo de Desarrollo Regional (project TK134)es
dc.description.projectEstonian Research Agency (grants PRG753 and PRG4)es
dc.description.projectMinisterio de Economía, Industria y Competitividad (grant TEC2017-84321-C4-2-R)es
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.type.hasVersioninfo:eu-repo/semantics/publishedVersiones


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