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Electrical and magnetic properties of atomic layer deposited cobalt oxide and zirconium oxide nanolaminates
dc.contributor.authorKalam, Kristjan
dc.contributor.authorSeemen, Helina
dc.contributor.authorMikkor, Mats
dc.contributor.authorJõgiaas, Taivo
dc.contributor.authorRitslaid, Peeter
dc.contributor.authorTamm, Aile
dc.contributor.authorKukli, Kaupo
dc.contributor.authorKasikov, Aarne
dc.contributor.authorLink, Joosep
dc.contributor.authorStern, Raivo
dc.contributor.authorDueñas Carazo, Salvador 
dc.contributor.authorCastán Lanaspa, María Helena 
dc.date.accessioned2021-02-01T09:39:32Z
dc.date.available2021-02-01T09:39:32Z
dc.date.issued2019
dc.identifier.citationThin Solid Films Volume 669, 2019, Pages 294-300es
dc.identifier.issn0040-6090es
dc.identifier.urihttp://uvadoc.uva.es/handle/10324/45168
dc.descriptionProducción Científicaes
dc.description.abstractNanolaminates of ZrO2 and Co3O4 were atomic layer deposited on silicon and titanium nitride at 300 °C. Films were confirmed to be polycrystalline in the as-deposited state, with the cubic phase dominating in both oxides. All films exhibited resistive switching characteristics and charge polarization and ferromagnetic behavior. Also, the relative permittivities of the films were measured and the dispersion functions modelled.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherElvieres
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subject.classificationÓxido de cobaltoes
dc.subject.classificationCobalt oxidees
dc.titleElectrical and magnetic properties of atomic layer deposited cobalt oxide and zirconium oxide nanolaminateses
dc.typeinfo:eu-repo/semantics/articlees
dc.rights.holder© 2019 Elsevieres
dc.identifier.doi10.1016/j.tsf.2018.11.008es
dc.relation.publisherversionhttps://www.sciencedirect.com/science/article/pii/S0040609018307491es
dc.identifier.publicationfirstpage294es
dc.identifier.publicationlastpage300es
dc.identifier.publicationtitleThin Solid Filmses
dc.identifier.publicationvolume669es
dc.peerreviewedSIes
dc.description.projectMinisterio de Economía, Industria y Competitividad (TEC2017-84321-C4-2-R)es
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.type.hasVersioninfo:eu-repo/semantics/acceptedVersiones
dc.subject.unesco2202 Electromagnetismoes


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