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dc.contributor.authorKalam, Kristjan
dc.contributor.authorRammula, Raul
dc.contributor.authorRitslaid, Peeter
dc.contributor.authorKäämbre, Tanel
dc.contributor.authorLink, Joosep
dc.contributor.authorStern, Raivo
dc.contributor.authorVinuesa Sanz, Guillermo
dc.contributor.authorDueñas Carazo, Salvador 
dc.contributor.authorCastán Lanaspa, María Helena 
dc.contributor.authorTamm, Aile
dc.contributor.authorKukli, Kaupo
dc.date.accessioned2021-05-14T09:43:44Z
dc.date.available2021-05-14T09:43:44Z
dc.date.issued2021
dc.identifier.citationNanotechnology, 2021. In press. 27 p.es
dc.identifier.issn1361-6528es
dc.identifier.urihttp://uvadoc.uva.es/handle/10324/46598
dc.descriptionProducción Científicaes
dc.description.abstractAtomic layer deposition method was used to grow thin films consisting of ZrO2 and MnOx layers. All depositions were carried out at 300 ºC. Some deposition characteristics of the manganese(III)acetylacetonate and ozone process were investigated, such as crystallinity and the dependence of growth rate on the deposition temperature. All films were partly crystalline in their as-deposited state. Zirconium oxide contained cubic and tetragonal phases of ZrO2, while the manganese oxide was shown to consist of cubic Mn2O3 and tetragonal Mn3O4 phases. All the films exhibited nonlinear saturative magnetization with hysteresis, as well as resistive switching characteristics.es
dc.format.mimetypeapplication/pdfes
dc.language.isoenges
dc.publisherIOP Publishinges
dc.rights.accessRightsinfo:eu-repo/semantics/openAccesses
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subject.classificationAtomic layer depositiones
dc.subject.classificationDeposición de capas atómicases
dc.subject.classificationThin filmses
dc.subject.classificationLáminas delgadases
dc.subject.classificationMagnetic materialses
dc.subject.classificationMateriales magnéticoses
dc.subject.classificationResistive switchinges
dc.subject.classificationConmutación resistivaes
dc.titleAtomic layer deposited nanolaminates of zirconium oxide and manganese oxide from manganese(III)acetylacetonate and ozonees
dc.typeinfo:eu-repo/semantics/articlees
dc.rights.holder© 2021 IOP Publishinges
dc.identifier.doi10.1088/1361-6528/abfee9es
dc.relation.publisherversionhttps://iopscience.iop.org/article/10.1088/1361-6528/abfee9es
dc.peerreviewedSIes
dc.description.projectFondo Europeo de Desarrollo Regional (projects TK134 and TK141)es
dc.description.projectMinisterio de Economía, Industria y Competitividad (project TEC2017-84321-C4-2-R)es
dc.description.projectEstonian Research Agency (projects PRG4 and PRG753)es
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.type.hasVersioninfo:eu-repo/semantics/acceptedVersiones


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