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Título
RRAM Memories with ALD High-K Dielectrics: Electrical Characterization and Analytical Modeling
Autor
Año del Documento
2017
Editorial
InetchOpen
Descripción
Producción Científica
Documento Fuente
2017 Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets, Chapter 9
Resumen
Resistive switching phenomena with adequate repetitiveness on Ta2O5-TiO2-Ta2O5 and TiO2-Ta2O5-TiO2 stacks are reported. In particular, 5–nm-thick TiO2 films embedding a monolayer of Ta2O5 show the best behavior in terms of bipolar cycles loop width, with separate low and high resistive states up to two orders of magnitude. Tantalum oxide layer increases the defect density in titania that becomes less leaky, and thus, resistive switching effects appear. Small signal ac parameters measured at low and medium frequencies, namely capacitance and conductance, also show hysteretic behavior during a whole bipolar switching cycle. This means that the memory state can be read at 0 V, without any power consumption. High-frequency measurements provide information about dipole relaxation frequency values in the dielectric bulk, and this can be connected with resistive switching behavior. Finally, a double tunneling barrier model fits I-V curves at the low-resistance state even at the bias range where reset occurs and a sharp fall takes place.
Palabras Clave
resistive switching
tantalum oxide
titanium oxide
RF impedance
modeling
ISBN
978-953-51-3068-0
Patrocinador
Spanish Ministry of Economy and Competitiveness through project TEC2014-52152-C3-3-R, with support of Feder funds, Finnish Centre of Excellence in Atomic Layer Deposition, and Estonian Research Agency (PUT170, IUT2–24), and by the European Regional Development Fund projects TK134 “Emerging orders in quantum and nanomaterials” and TK141 “Advanced materials and high-technology devices for energy recuperation systems”. Authors would like to acknowledge Dr. M. B. González and Prof. F. Campabadal (IMB-CNM, Barcelona, Spain) for providing some samples of this study.
Version del Editor
Idioma
eng
Tipo de versión
info:eu-repo/semantics/publishedVersion
Derechos
openAccess
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