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Título
Atomistic study of the anisotropic interaction between extended and point defects in crystalline silicon and its influence on Si self-interstitial diffusion
Autor
Congreso
2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
Año del Documento
2016
Editorial
Institute of Electrical and Electronics Engineers (IEEE)
Descripción
Producción Científica
Documento Fuente
2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Nuremberg, 2016, p. 35-37
Abstract
In this work we propose a methodology to analyze the elastic energy interaction at the atomic level between Si self-interstitials and extended defects in crystalline Si. The representation of this energy in maps in 2D planes shows the anisotropic nature of the elastic interaction. This elastic energy maps can be used to understand diffusion trajectories of Si self-interstitials around extended defects obtained from classical molecular dynamics simulations. The combined analysis of these trajectories and the elastic energy maps shows preferential capture directions around extended defects.
Palabras Clave
Simulaciones atomísticas
Silicio cristalino
Atomistic simulation
Crystalline silicon
ISBN
978-1-5090-0818-6
Patrocinador
Ministerio de Ciencia e Innovación (Proyect TEC2014-60694-P)
Junta de Castilla y León (programa de apoyo a proyectos de investigación - Ref. VA331U14)
Junta de Castilla y León (programa de apoyo a proyectos de investigación - Ref. VA331U14)
Version del Editor
Idioma
eng
Derechos
openAccess
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