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Por favor, use este identificador para citar o enlazar este ítem: http://uvadoc.uva.es/handle/10324/28965
Título: Molecular dynamics simulation of the regrowth of nanometric multigate Si devices
Autor: Marqués Cuesta, Luis Alberto
Pelaz Montes, María Lourdes
Santos Tejido, Iván
López Martín, Pedro
Duffy, Ray
Año del Documento: 2012
Editorial: AIP Publishing
Descripción: Producción Científica
Documento Fuente: Journal of Applied Physics, 2012, 111, 034302
Resumen: We use molecular dynamics (MD) simulation techniques to study the regrowth of nanometric multigate Si devices, such as fins and nanowires, surrounded by free surfaces and interfaces with amorphous material. Our results indicate that atoms in amorphous regions close to lateral free surfaces or interfaces rearrange at a slower rate compared to those in bulk due to the discontinuity of the lateral crystalline template. Consequently, the recrystallization front which advances faster in the device center than at the interfaces adopts new orientations. Regrowth then proceeds depending on the particular orientation of the new amorphous/crystal interfaces. In the particular case of 〈110〉 oriented fins, the new amorphous/crystal interfaces are aligned along the 〈111〉 direction, which produces frequent twining during further regrowth. Based on our simulation results, we propose alternatives to overcome this defected recrystallization in multigate structures: device orientation along 〈100〉 to prevent the formation of limiting {111} amorphous/crystal interfaces and presence of a crystalline seed along the device body to favor regrowth perpendicular to the lateral surfaces/interfaces rather than parallel to them.
Palabras Clave: Molecular dynamics simulation
Simulación de dinámica molecular
Revisión por Pares: SI
DOI: https://doi.org/10.1063/1.3679126
Patrocinador: Ministerio de Economía, Industria y Competitividad (Project TEC2008-06069)
Version del Editor: https://aip.scitation.org/doi/full/10.1063/1.3679126
Propietario de los Derechos: © American Institute of Physics
Idioma: eng
URI: http://uvadoc.uva.es/handle/10324/28965
Derechos: info:eu-repo/semantics/openAccess
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