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    Por favor, use este identificador para citar o enlazar este ítem:http://uvadoc.uva.es/handle/10324/44922

    Título
    Atomic layer deposition and performance of ZrO2-Al2O3 thin films
    Autor
    Kukli, Kaupo
    Kemell, Marianna
    Castán Lanaspa, María HelenaAutoridad UVA Orcid
    Dueñas Carazo, SalvadorAutoridad UVA Orcid
    Seemen, Helina
    Rähn, Mihkel
    Link, Joosep
    Stern, Raivo
    Heikkilä, Mikko J.
    Ritala, Mikko
    Leskelä, Markku
    Año del Documento
    2018
    Editorial
    IOP Publishing
    Descripción
    Producción Científica
    Documento Fuente
    ECS Journal of Solid State Science and Technology, 2018, vol. 7, n. 5. 26 p.
    Abstract
    Thin mixed and nanolaminate films of ZrO2 and Al2O3 were grown by atomic layer deposition from the corresponding metal chlorides and water. The films were grown at 350°C in order to ensure ZrO2 crystallization in the as-deposited state. The relative thicknesses of layers in the structure of the nanolaminates were controlled in order to maximize the content of metastable polymorphs of ZrO2 that have higher permittivity than that of the stable monoclinic ZrO2. The multilayer films demonstrated interfacial charge polarization and saturative magnetization in external fields. The conductivity of the films could be switched between high and low resistance states by applying voltages of alternating polarity.
    Palabras Clave
    Atomic layer deposition
    Deposición atómica de capas
    Thin films
    Láminas delgadas
    Metal oxides
    Óxidos metálicos
    ISSN
    2162-8777
    Revisión por pares
    SI
    DOI
    10.1149/2.0021806jss
    Patrocinador
    Finnish Centre of Excellence in Atomic Layer Deposition (grant 284623)
    Fondo Europeo de Desarrollo Regional (project TK134)
    Ministerio de Economía, Industria y Competitividad - Fondo Europeo de Desarrollo Regional (grant TEC2014-52152-C3-3-R)
    Estonian Research Agency (grants IUT2-24 and IUT23-7)
    Version del Editor
    https://iopscience.iop.org/article/10.1149/2.0021806jss
    Propietario de los Derechos
    © 2018 IOP Publishing
    Idioma
    eng
    URI
    http://uvadoc.uva.es/handle/10324/44922
    Tipo de versión
    info:eu-repo/semantics/acceptedVersion
    Derechos
    openAccess
    Aparece en las colecciones
    • GCME - Artículos de revista [57]
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    Attribution-NonCommercial-NoDerivatives 4.0 InternacionalLa licencia del ítem se describe como Attribution-NonCommercial-NoDerivatives 4.0 Internacional

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